Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

著者

• Yoshihara, Hideo
• Society of Photo-optical Instrumentation Engineers. Japan Chapter
• BACUS (Technical group)
• Photomask Japan '94

書誌事項

Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

Hideo Yoshihara, chair/editor ; sponsored by Japan Chapter of SPIE ; cosponsored by BACUS, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2254）

SPIE, c1994

注記

"Papers presented at Photomask Japan '94 held at the Kanagawa Science Park in Kawasaki, Japan, on 22 April 1994"--P. ix

Includes bibliographical references and index

• NII書誌ID(NCID): BA29150665
• ISBN:
  • 0819415634
• LCCN: 94065772
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 488 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.3815/31
• 件名:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• 親書誌ID:
  • BA0022700X