Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

著者

    • Yoshihara, Hideo
    • Society of Photo-optical Instrumentation Engineers. Japan Chapter
    • Photomask Japan '94

書誌事項

Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

Hideo Yoshihara, chair/editor ; sponsored by Japan Chapter of SPIE ; cosponsored by BACUS, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2254）

SPIE, c1994

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注記

"Papers presented at Photomask Japan '94 held at the Kanagawa Science Park in Kawasaki, Japan, on 22 April 1994"--P. ix

Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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