Process engineering analysis in semiconductor device fabrication
Author(s)
Bibliographic Information
Process engineering analysis in semiconductor device fabrication
（McGraw-Hill chemical engineering series）
McGraw-Hill, c1993
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
Written primarily for chemical engineering students, the material included in this new text is an extension of upper level chemical engineering courses. Covering a range of processes in semiconductor device fabrication, the authors try to present traditional chemical engineering methodology in a non-traditional context. The text covers such topics as crystal growth and filtration and contains over 300 worked examples and problems.
Table of Contents
- The physics of solids
- device background
- process modelling
- the conservation equations
- filtration of particles
- particle deposition and removal
- purity in process chemicals
- silicon production
- oxidation
- microlithography
- doping
- etching
- chemical vapour deposition
- ion implantation
- metalization.
by "Nielsen BookData"
