Microelectromechanical systems (MEMS) : presented at 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia

著者

• International Mechanical Engineering Congress and Exposition
• American Society of Mechanical Engineers. Dynamic Systems and Control Division
• American Society of Mechanical Engineers. the Fluids Engineering Div.
• American Society of Mechanical Engineers. Heat Transfer Division
• American Society of Mechanical Engineers. Electrical and Electronic Packaging Division
• American Society of Mechanical Engineers. Applied Mechanics Division

書誌事項

Microelectromechanical systems (MEMS) : presented at 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia

sponsored by the Dynamic Systems and Control Division, ASME ...[et al.]

（DSC, vol. 59）

American Society of Mechanical Engineers, c1996

タイトル別名

Micro-electro-mechanical systems (MEMS)

内容説明・目次

内容説明

The proceedings of the International Mechanical Engineering Congress and Exposition held in Atlanta in November, 1996 are divided into the following sections: microscale thermal phenomena in electronic systems, including thermal phenomena in semiconductor devices, thermomechanical sensors and actuat

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA29864650
• ISBN:
  • 0791815412
• LCCN: 96078683
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York
• ページ数/冊数: viii, 460 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA10135462