書誌事項

Microelectromechanical systems (MEMS) : presented at 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia

sponsored by the Dynamic Systems and Control Division, ASME ...[et al.]

(DSC, vol. 59)

American Society of Mechanical Engineers, c1996

タイトル別名

Micro-electro-mechanical systems (MEMS)

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内容説明・目次

内容説明

The proceedings of the International Mechanical Engineering Congress and Exposition held in Atlanta in November, 1996 are divided into the following sections: microscale thermal phenomena in electronic systems, including thermal phenomena in semiconductor devices, thermomechanical sensors and actuat

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  • DSC

    American Society of Mechanical Engineers (ASME)

詳細情報
  • NII書誌ID(NCID)
    BA29864650
  • ISBN
    • 0791815412
  • LCCN
    96078683
  • 出版国コード
    us
  • タイトル言語コード
    eng
  • 本文言語コード
    eng
  • 出版地
    New York
  • ページ数/冊数
    viii, 460 p.
  • 大きさ
    28 cm
  • 親書誌ID
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