Microelectromechanical systems (MEMS) : presented at 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia
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Bibliographic Information
Microelectromechanical systems (MEMS) : presented at 1996 International Mechanical Engineering Congress and Exposition, November 17-22, 1996, Atlanta, Georgia
（DSC, vol. 59）
American Society of Mechanical Engineers, c1996
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Micro-electro-mechanical systems (MEMS)
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Description and Table of Contents
Description
The proceedings of the International Mechanical Engineering Congress and Exposition held in Atlanta in November, 1996 are divided into the following sections: microscale thermal phenomena in electronic systems, including thermal phenomena in semiconductor devices, thermomechanical sensors and actuat
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