IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 96 proceedings, November 11-14, 1996, Cambridge, Massachusetts

Bibliographic Information

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 96 proceedings, November 11-14, 1996, Cambridge, Massachusetts

IEEE Service Center, c1996

  • : soft.
  • : case.

Other Title

96CB35953 96CH35953

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Includes bibliographical references

"IEEE catalog number 96CH35953"

"Theme - Innovation approaches to growth in the semiconductor industry"

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