IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 96 proceedings, November 11-14, 1996, Cambridge, Massachusetts

著者

• IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop
• Institute of Electrical and Electronics Engineers
• Semiconductor Equipment and Materials International

書誌事項

IEEE/SEMI Advanced Semiconductor Manufacturing Conference and Workshop : ASMC 96 proceedings, November 11-14, 1996, Cambridge, Massachusetts

IEEE Service Center, c1996

• : soft.
• : case.

タイトル別名

96CB35953 96CH35953

注記

Includes bibliographical references

"IEEE catalog number 96CH35953"

"Theme - Innovation approaches to growth in the semiconductor industry"

内容説明・目次

内容説明

This text focuses on the methods used to achieve successful results in manufacturing advanced semiconductors. It covers such topics as: computer integrated manufacturing (CIM); maximizing equipment productivity; inline inspection for defect reduction; and manufacturing cost reduction techniques.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA29910565
• ISBN:
  • 0780333713
  • 0780333721
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, NJ
• ページ数/冊数: vi, 479 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7836
  • DC20 : 621.381/52
• 件名:
  • LCSH : Electronic industries -- Congresses
  • LCSH : Semiconductors -- Design and construction -- Congresses
  • LCSH : Computer integrated manufacturing systems -- Congresses