Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas

著者

• Markus, Karen W.
• Semiconductor Equipment and Materials International
• National Institute of Standards and Technology (U.S.)
• Society of Photo-optical Instrumentation Engineers

書誌事項

Micromachining and microfabrication process technology : 23-24 October, 1995, Austin, Texas

Karen W. Markus, chair/editor ; sponsored by SEMI--Semiconductor Equipment and Materials International, NIST--National Institute of Standards and Technology, SPIE--The International Society of Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2639）

SPIE, c1995

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA30112492
• ISBN:
  • 0819420050
• LCCN: 95070374
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: vii, 336 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TJ1191.5
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Micromachining -- Congresses
  • LCSH : Microfabrication -- Congresses
  • LCSH : Electromechanical devices -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X