Proceedings, IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and robots : Nagoya, Japan, January 26-30, 1997

Author(s)

• IEEE Robotics and Automation Society
• IEEE Workshop on Micro Electro Mechanical Systems
• American Society of Mechanical Engineers. Dynamic Systems and Control Division
• Micromachine Center

Bibliographic Information

Proceedings, IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and robots : Nagoya, Japan, January 26-30, 1997

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center

IEEE Service Center, c1997

• : soft
• : case
• : micro

Other Title

MEMS

MEMS97

97CH36021

Note

"IEEE catalog number: 97CH36021"

Includes bibliographical references and indexes

Details

• NCID: BA3046538X
• ISBN:
  • 0780337441
  • 078033745X
  • 0780337468
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway, N.J.
• Pages/Volumes: xxiv, 545 p.
• Size: 30 cm
• Subject Headings:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses