Proceedings, IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and robots : Nagoya, Japan, January 26-30, 1997
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書誌事項
Proceedings, IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and robots : Nagoya, Japan, January 26-30, 1997
IEEE Service Center, c1997
- : soft
- : case
- : micro
- タイトル別名
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MEMS
MEMS97
97CH36021
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"IEEE catalog number: 97CH36021"
Includes bibliographical references and indexes