Ion and neutral spectroscopy
著者
書誌事項
Ion and neutral spectroscopy
（Practical surface analysis, v. 2）
Wiley , Salle+Sauerlander, 1996. c1992
2nd ed
- : pbk
大学図書館所蔵 件 / 全6件
-
該当する所蔵館はありません
- すべての絞り込み条件を解除する
注記
Includes bibliographical references and index
First published as a paperback in March 1996
内容説明・目次
内容説明
This volume reflects the rapid evolution of surface analysis techniques involving ion and neural spectroscopies. Sputtering techniques are comprehensively discussed in chapters covering instrumentation, theory, quantification, dynamic and static SIMS and various applications.
目次
- A perspective on the analysis of surfaces and interfaces
- instrumentation for SIMS
- basic aspects of sputter depth profiling
- quantitative analysis using sputtering techniques - secondary ion and sputtered neutral mass spectrometry
- dynamic SIMS and its applications in microelectronics
- static SIMS - surface analysis of organic materials
- sputtered neutral mass spectrometry (SNMS)
- ion scattering spectroscopic techniques
- medium energy ion scattering.
「Nielsen BookData」 より
