Microlithography
著者
書誌事項
Microlithography
（IEE materials & devices series, 12 . Handbook of microlithography,
SPIE Optical Engineering Press , Institution of Electrical Engineers, c1997
- : us
- : uk
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注記
"SPIE press monograph PM39"
Includes bibliographical references and index
内容説明・目次
- 巻冊次
-
: us ISBN 9780819423788
内容説明
The dynamic field of lithography demands an authoritative handbook for process development and production and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook.
- 巻冊次
-
: uk ISBN 9780852969069
内容説明
Focusing on the use of microlithography techniques in microelectronics manufacturing, this volume is one of a series addressing a rapidly growing field affecting the integrated circuit industry. New applications in such areas as sensors, actuators and biomedical devices, are described.
目次
- Optical lithography
- electron beam lithography
- X-ray lithography
- deep UV resist technology
- photomask fabrication procedures and limitations
- metrology methods in photolithography
- optical lithography modelling
- issues in nanolithography for quantum effect device manufacture.
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