Microlithography

Author(s)

• Rai-Choudhury, P.

Bibliographic Information

Microlithography

（IEE materials & devices series, 12 . Handbook of microlithography, micromachining and microfabrication / P. Rai-Choudhury, editor ; v. 1）

SPIE Optical Engineering Press , Institution of Electrical Engineers, c1997

• : us
• : uk

Note

"SPIE press monograph PM39"

Includes bibliographical references and index

Details

• NCID: BA31844102
• ISBN:
  • 9780819423788
  • 0852969066
• LCCN: 96040237
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.,London
• Pages/Volumes: viii, 768 p.
• Size: 26 cm
• Classification:
  • LCC : TK7836
  • DC21 : 670
• Subject Headings:
  • LCSH : Microlithography
  • LCSH : Micromachining
  • LCSH : Microfabrication
• Parent Bibliography ID:
  • BA07412236