Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.

著者

    • Symposium on Environmental, Safety, and Health (ESH) Issues in IC Production

書誌事項

Environmental, safety, and health issues in IC production : symposium held December 4-5, 1996, Boston, Massachusetts, U.S.A.

editors, Rafael Reif ... [et al.]

(Materials Research Society symposium proceedings, v. 447)

Materials Research Society, c1997

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注記

Includes bibliographical references and index

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