Handbook of charged particle optics
著者
書誌事項
Handbook of charged particle optics
CRC Press, 1997
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This timely handbook contains chapters on the essential elements of high resolution charged particle optics and is written by many of the world's leading research scientists. It is a complete guide to understanding, designing, and using high resolution instrumentation such as transmission electron microscopes (TEMs), scanning electron microscopes (SEMs), scanning transmission electron microscopes (STEMs), and focused ion beam (FIB) systems. This handbook is evenly balanced between theory and application, and covers all the most important topics in this growing area. Handbook of High Resolution Charged Particle Optics explains how and why high resolution instruments work and how to apply this information when designing or using them.
目次
Computational Techniques for the Design of Charged Particle Optical Designs, E. Munro (Munro's Electron Optics Software, Ltd., U.K.)
A Review of the Zr/O Schottky Cathode, L.W. Swanson and G. Schwind (FEI Company, U.S.)
Liquid Metal Ion Sources, G.L.R. Mair (Department of Physics, University of Athens, Greece)
Magnetic Lenses for Electron Microscopy, K. Tsuno (JEOL, Ltd., Japan)
Electrostatic Lenses, B. Lencova (Institute for Scientific Instruments of the Czech Academy of Sciences, Czech Republic)
Aberrations, P.W. Hawkes (Laboratoire du Optique Electronique, C.N.R.S., France)
Space Charge, P. Kruitt and G. Jansen (Technical University of Delft, The Netherlands)
Resolution, M. Sato (Hitachi, Ltd., Japan)
The Transmission Electron Microscope, F. Nagata (Hitachi, Ltd., Japan)
The Scanning Electron Microscope, M. Postek (National Institute of Science and Technology, U.S.)
The Scanning Transmission Electron Microscope, A.V. Crewe (Department of Physics, University of Chicago, U.S.)
Focused Ion Beams, M. Utlaut (University of Portland, U.S.)
Index
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