Proceedings of the First International Symposium on Chemical Mechanical Planarization

著者

• International Symposium on Chemical Mechanical Planarization
• Ali, Iqbal
• Raghavan, S. (Srini)
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

書誌事項

Proceedings of the First International Symposium on Chemical Mechanical Planarization

editors, I. Ali, S. Raghavan

（Proceedings / [Electrochemical Society], v. 96-22）

Electrochemical Society, c1997

注記

"Electronics and Delectric Science and Technology Divisions"

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA32334994
• ISBN:
  • 1566771722
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: ix, 275 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290