Conference proceedings, 1997 International Conference on Indium Phosphide and Related Materials, 11-15 May 1997, Tara Hyanns Hotel and Resort, Hyannis, Cape Cod, Massachusetts, USA
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Bibliographic Information
Conference proceedings, 1997 International Conference on Indium Phosphide and Related Materials, 11-15 May 1997, Tara Hyanns Hotel and Resort, Hyannis, Cape Cod, Massachusetts, USA
IEEE Service Center, c1997
- : soft.
- : case.
- Other Title
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1997 IEEE 9th International Conference on Indium Phosphide & Related Materials
97CH36058 97CB36058
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"IEEE catalog #97CH36058"
Description and Table of Contents
Description
This text examines test structures for microelectronic devices, their recent progress and future directions. Topics highlighted include: process characterization, dimensional measurements, interconnection, material characterization, reliability, device characterization and statistics.
by "Nielsen BookData"