Conference proceedings, 1997 International Conference on Indium Phosphide and Related Materials, 11-15 May 1997, Tara Hyanns Hotel and Resort, Hyannis, Cape Cod, Massachusetts, USA

著者

• International Conference on Indium Phosphide and Related Materials
• Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)
• IEEE Electron Devices Society

書誌事項

Conference proceedings, 1997 International Conference on Indium Phosphide and Related Materials, 11-15 May 1997, Tara Hyanns Hotel and Resort, Hyannis, Cape Cod, Massachusetts, USA

sponsored by the IEEE Lasers and Electro-Optics Society and the IEEE Electron Devices Society

IEEE Service Center, c1997

• : soft.
• : case.

タイトル別名

1997 IEEE 9th International Conference on Indium Phosphide & Related Materials

97CH36058 97CB36058

注記

"IEEE catalog #97CH36058"

内容説明・目次

内容説明

This text examines test structures for microelectronic devices, their recent progress and future directions. Topics highlighted include: process characterization, dimensional measurements, interconnection, material characterization, reliability, device characterization and statistics.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA32823221
• ISBN:
  • 0780338987
  • 0780338995
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway
• ページ数/冊数: xii, 680 p.
• 大きさ: 28 cm
• 件名:
  • LCSH : Electronics -- Materials -- Congresses
  • LCSH : Indium phosphide -- Congresses