Micromachining and microfabrication
著者
書誌事項
Micromachining and microfabrication
（IEE materials & devices series, 12B . Handbook of microlithography,
SPIE Optical Engineering Press , Institution of Electrical Engineers, c1997
- : us
- : uk
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注記
"SPIE press monograph PM40"
Includes bibliographical references and index
内容説明・目次
- 巻冊次
-
: us ISBN 9780819423795
目次
v. 1. Microlithography -- v. 2. Micromachining and microfabrication.
- 巻冊次
-
: uk ISBN 9780852969113
内容説明
This volume concentrates on the process technology and device applications associated with micomachining and microfabrication. The handbook is intended primarily for industrial laboratories, universities and manufacturing facilities.
目次
- Micromachining and trends for the 21st century
- wet chemical etching of silicon and SiO2
- issues in dry etching
- plating techniques
- high aspect ratio processing
- sensors and actuators
- micro-optical devices
- biomedical devices
- smart materials, MEMs and electronics integration.
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