Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A.

著者

• Workshop on Tungsten and Other Refractory Metals for VLSI Applications
• Eliot K. Broadbent
• Blewer, R. S.
• Materials Research Society

書誌事項

Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A.

sponsored by Continuing Education in Engineering, University Extension, University of California, Berkeley ; editor, Eliot K. Broadbent ; associate editors, Robert S. Blewer ... [et al]

（Materials Research Society conference proceedings）

Materials Research Society, c1987

注記

Includes bibliographical references and index

内容説明・目次

内容説明

The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

「Nielsen BookData」 より

• NII書誌ID(NCID): BA33720519
• ISBN:
  • 0931837669
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pittsburgh, Pa
• ページ数/冊数: xvii, 426 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA07468230