Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A.
Author(s)
Bibliographic Information
Tungsten and other refractory metals for VLSI applications II : proceedings of the 1986 workshop held November 12-14, 1986, Palo Alto, California, U.S.A.
（Materials Research Society conference proceedings）
Materials Research Society, c1987
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Institute for Space–Earth Environmental Research, Nagoya University宇宙地球研1
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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