Introduction to microlithography

Author(s)

• Thompson, L. F.
• Willson, C. G. (C. Grant)
• Bowden, M. J.

Bibliographic Information

Introduction to microlithography

edited by Larry F. Thompson, C. Grant Willson, Murrae J. Bowden

（ACS professional reference book）

American Chemical Society, 1994

2nd ed

Note

Includes bibliographical references and index

Details

• NCID: BA3402261X
• ISBN:
  • 0841228485
• LCCN: 93042023
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Washington, DC
• Pages/Volumes: xiv, 527 p.
• Size: 24 cm
• Subject Headings:
  • LCSH : Microlithography -- Congresses
  • LCSH : Photoresists -- Congresses
  • LCSH : Plasma etching -- Congresses
  • LCSH : Semiconductors -- Etching -- Congresses
• Parent Bibliography ID:
  • BA04443415