Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998

Author(s)

• IEEE Robotics and Automation Society
• IEEE Workshop on Micro Electro Mechanical Systems
• American Society of Mechanical Engineers. Dynamic Systems and Control Division
• Ministry of Economic Affairs of Baden-Württemberg

Bibliographic Information

Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg

IEEE Service Center, c1998

• : soft
• : case
• : micro

Other Title

MEMS

MEMS98

98CH36176

Note

"IEEE catalog number: 98CH36176"

Includes bibliographical references

Details

• NCID: BA3732636X
• ISBN:
  • 078034412X
  • 0780344138
  • 0780344146
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway, N.J.
• Pages/Volumes: xxx, 666 p.
• Size: 30 cm
• Subject Headings:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses