Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998

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書誌事項

Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg

IEEE Service Center, c1998

  • : soft
  • : case
  • : micro

タイトル別名

MEMS

MEMS98

98CH36176

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注記

"IEEE catalog number: 98CH36176"

Includes bibliographical references

内容説明・目次

内容説明

This text focuses on the design, modelling, fabrication, operation and applications of microelectromechanical devices, machines and systems which are constructed on the micrometre to millimetre scale.

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