Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998

著者

• IEEE Robotics and Automation Society
• IEEE Workshop on Micro Electro Mechanical Systems
• American Society of Mechanical Engineers. Dynamic Systems and Control Division
• Ministry of Economic Affairs of Baden-Württemberg

書誌事項

Proceedings, IEEE the Eleventh Annual International Workshop on Micro Electro Mechanical Systems : an investigation of micro structures,sensors, actuators, machines and systems : Heidelberg, Germany, January 25-29, 1998

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Ministry of Economic Affairs of Baden-Württemberg

IEEE Service Center, c1998

• : soft
• : case
• : micro

タイトル別名

MEMS

MEMS98

98CH36176

注記

"IEEE catalog number: 98CH36176"

Includes bibliographical references

詳細情報

• NII書誌ID(NCID): BA3732636X
• ISBN:
  • 078034412X
  • 0780344138
  • 0780344146
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, N.J.
• ページ数/冊数: xxx, 666 p.
• 大きさ: 30 cm
• 件名:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses