Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

著者

• Stover, John C.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 29-30 January 1998, San Jose, California

John C. Stover, chair/editor

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3275）

Sponsored and published by SPIE-The International Society for Optical Engineering, c1998

タイトル別名

Flatness, roughness, and discrete defects characterization for computer disks, wafers, and flat panel displays II : 1998 San Jose

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA37669537
• ISBN:
  • 0819427144
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: vii, 186 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC21 : 621.3815/2
• 件名:
  • LCSH : Semiconductor wafers -- Measurement -- Congresses
  • LCSH : Surface roughness -- Measurement -- Congresses
  • LCSH : Flatness measurement -- Congresses
• 親書誌ID:
  • BA0022700X