Fifth International Vacuum Congress proceedings issue

著者

• International Vacuum Congress
• Redhead, P. A.
• American Vacuum Society
• Ehrlich, G.
• Hoffman, R. W.
• Baker, Jill
• International Union of Vacuum Science, Technology and Application

書誌事項

Fifth International Vacuum Congress proceedings issue

editor, P. A. Redhead ; associated editor, G. Ehrlich ... [et al.] ; editorial board, R. W. Hoffman ... [et. al.] ; assistant to the editor, Jill Baker

（Journal of vacuum science & technology, vol. 9 no. 1, 1972）

The American Institute of Physics, c1972

タイトル別名

Proceedings of the Fifth International Vacuum Congress, 11-15 October 1971, Sheraton-Boston Hotel, Boston, Mass. U.S.A

注記

Title from cover

"Sponsored by the International Union of Vacuum Science Technology abd Application and the American Vacuum Society"

"The official journal of the American Vacuum Society"

詳細情報

• NII書誌ID(NCID): BA38455619
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: New York
• ページ数/冊数: 32, 560, 33-48 p.
• 大きさ: 29 cm
• 分類:
  • LCC : TR940
  • DC19 : 686.2/325
• 件名:
  • LCSH : Photolithography -- Congresses
  • LCSH : Lithography, Electron beam -- Congresses
  • LCSH : Ion beam lithography -- Congresses
  • LCSH : X-ray lithography -- Congresses
  • LCSH : Photoresists -- Congresses
• 親書誌ID:
  • BA07799828