High-resolution x-ray scattering from thin films and multilayers

書誌事項

High-resolution x-ray scattering from thin films and multilayers

Václav Holý, Ullrich Pietsch, Tilo Baumbach

(Springer tracts in modern physics : Ergebnisse der exakten Naturwissenschaften / editor, G. Höhler, 149)

Springer, c1999

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This critical overview presents experimental methods for solving most frequent structural problems of mono-crystalline thin films and layered systems, including thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is intended as a reference for experimentalists who want to improve their knowledge on modern X-ray methods for thin film analysis.

目次

  • Part 1 Experimental realization: basic elements of an equipment
  • resolution elements
  • diffractometers and reflectometers. Part 2 The theory of X-ray diffraction and its realization by the experiment: kinematical X-ray scattering from ideal crystals
  • kinematical X-ray diffraction from deformed thin layers
  • kinematical X-ray diffraction from randomly disturbed layers
  • dynamical X-ray diffraction in perfect layers
  • dynamical X-ray diffraction in slightly deformed layers
  • optical reflection of X-rays from ideal layers
  • optical reflection of X-rays from layers with rough interfaces
  • dynamical X-ray diffraction in strongly asymmetric cases
  • grazing incidence diffraction (GID). Appendices: elements of the formal theory of scattering
  • structure factors, dispersion corrections and extinction length.

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  • Springer tracts in modern physics : Ergebnisse der exakten Naturwissenschaften

    editor, G. Höhler

    Springer-Verlag 1965-

    v. 38 , v. 39 , v. 40 , v. 41 , v. 42 , v. 43 , v. 44 , v. 45 , v. 46 , v. 47 , v. 48 , v. 49 , v. 50 , v. 51 , v. 52 , v. 53 , v. 54 , v. 55 , v. 56 , v. 57 , v. 58 , v. 59 , v. 60 , v. 61 , v. 62 , v. 63 , v. 64 , v. 65 , v. 66 , v. 67 , v. 68 , v. 69 , v. 70 , v. 71 , v. 72 , v. 73 , v. 74

    所蔵館96館

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