High-resolution x-ray scattering from thin films and multilayers
著者
書誌事項
High-resolution x-ray scattering from thin films and multilayers
（Springer tracts in modern physics : Ergebnisse der exakten Naturwissenschaften / editor, G. Höhler, 149）
Springer, c1999
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This critical overview presents experimental methods for solving most frequent structural problems of mono-crystalline thin films and layered systems, including thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is intended as a reference for experimentalists who want to improve their knowledge on modern X-ray methods for thin film analysis.
目次
- Part 1 Experimental realization: basic elements of an equipment
- resolution elements
- diffractometers and reflectometers. Part 2 The theory of X-ray diffraction and its realization by the experiment: kinematical X-ray scattering from ideal crystals
- kinematical X-ray diffraction from deformed thin layers
- kinematical X-ray diffraction from randomly disturbed layers
- dynamical X-ray diffraction in perfect layers
- dynamical X-ray diffraction in slightly deformed layers
- optical reflection of X-rays from ideal layers
- optical reflection of X-rays from layers with rough interfaces
- dynamical X-ray diffraction in strongly asymmetric cases
- grazing incidence diffraction (GID). Appendices: elements of the formal theory of scattering
- structure factors, dispersion corrections and extinction length.
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