Small scale structures : proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for Sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995
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Bibliographic Information
Small scale structures : proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for Sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995
（European Materials Research Society symposia proceedings, 52）
Elsevier, 1996
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"Reprint from Sensors and actuators A51 (1). Sensors and actuators B31 (1-2). Thin solid films 275 (1-2)"--T.p. verso
Includes bibliographical references and indexes
Description and Table of Contents
Description
Papers from three symposia on aspects of small scale structure. Symposium A covers microstructuring and microsystems, Symposium B deals with materials for sensors (functional nanoscaled structures), and Symposium E looks at the structure and properties of metallic thin films and multilayers.
by "Nielsen BookData"