Small scale structures : proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for Sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995

著者

    • Symposium A on Microstructuring and Microsystems
    • Symposium B on Materials for Sensors: Functional Nanoscaled Structures
    • Symposium E on Structure and Properties of Metallic Thin Films and Multilayers

書誌事項

Small scale structures : proceedings of Symposium A on Microstructuring and Microsystems, Symposium B on Materials for Sensors: Functional Nanoscaled Structures, and Symposium E on Structure and Properties of Metallic Thin Films and Multilayers of the 1995 E-MRS Spring Conference, Strasbourg, France, May 22-26, 1995

edited by N.F. De Rooij ... [et al.]

（European Materials Research Society symposia proceedings, 52）

Elsevier, 1996

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注記

"Reprint from Sensors and actuators A51 (1). Sensors and actuators B31 (1-2). Thin solid films 275 (1-2)"--T.p. verso

Includes bibliographical references and indexes

内容説明・目次

内容説明

Papers from three symposia on aspects of small scale structure. Symposium A covers microstructuring and microsystems, Symposium B deals with materials for sensors (functional nanoscaled structures), and Symposium E looks at the structure and properties of metallic thin films and multilayers.

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