Conference proceedings, 1998 International Conference on Indium Phosphide and Related Materials, May 11-15, 1998, University of Tsukuba, University Hall, Tsukuba, Ibaraki, Japan
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Bibliographic Information
Conference proceedings, 1998 International Conference on Indium Phosphide and Related Materials, May 11-15, 1998, University of Tsukuba, University Hall, Tsukuba, Ibaraki, Japan
IEEE Service Center, c1998
- : soft.
- : case.
- Other Title
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1998 IEEE 10th International Conference on Indium Phosphide and Related Materials
98CH36129
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"IEEE catalog #98CH36129"
Description and Table of Contents
Description
This text examines test structures for microelectronic devices, their recent progress and future directions. It places an emphasis on such topics as: process characterization; dimensional measurements; interconnection; material characterization; reliability; device characterization; and statistics.
by "Nielsen BookData"