Conference proceedings, 1998 International Conference on Indium Phosphide and Related Materials, May 11-15, 1998, University of Tsukuba, University Hall, Tsukuba, Ibaraki, Japan

著者

• International Conference on Indium Phosphide and Related Materials
• 応用物理学会 オウヨウ ブツリ ガッカイ
• Lasers and Electro-optics Society (Institute of Electrical and Electronics Engineers)
• IEEE Electron Devices Society

書誌事項

Conference proceedings, 1998 International Conference on Indium Phosphide and Related Materials, May 11-15, 1998, University of Tsukuba, University Hall, Tsukuba, Ibaraki, Japan

sponsored by the Japan Society of Applied Physics, IEEE/Lasers and Electro-Optics Society, IEEE Electron Devices Society

IEEE Service Center, c1998

• : soft.
• : case.

タイトル別名

1998 IEEE 10th International Conference on Indium Phosphide and Related Materials

98CH36129

注記

"IEEE catalog #98CH36129"

内容説明・目次

内容説明

This text examines test structures for microelectronic devices, their recent progress and future directions. It places an emphasis on such topics as: process characterization; dimensional measurements; interconnection; material characterization; reliability; device characterization; and statistics.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA41652720
• ISBN:
  • 0780342208
  • 0780342216
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway
• ページ数/冊数: xvi, 849 p.
• 大きさ: 28 cm
• 件名:
  • LCSH : Electronics -- Materials -- Congresses
  • LCSH : Indium phosphide -- Congresses