Lithography process control
Author(s)
Bibliographic Information
Lithography process control
（Tutorial texts in optical engineering, v. TT 28）
SPIE Optical Engineering Press, c1999
- softcover
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Note
Includes bibliographical references (p. 169-188) and index
Description and Table of Contents
Description
This tutorial text covers lithography process control at several levels, from fundamental through advanced topics. A basic familiarity with lithography science is assumed. The book is intended to be a self contained tutorial that works as an introduction to those entering the field, and as a reference for the experienced lithography engineer.
Table of Contents
- Introduction to the use of statistical process control in lithography
- sampling
- simple and complex processes
- linewidth control
- overlay
- yield
- process drift and automatic process control
- metrology
- control of operations.
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