Mega-bit memory technology : from mega-bit to giga-bit
Author(s)
Bibliographic Information
Mega-bit memory technology : from mega-bit to giga-bit
（Japanese technology reviews, sect.A. electronics ; v.32）
Gordon & Breach, c1998
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Description and Table of Contents
Description
This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies-the longstanding technology driver of Si ULSI-as they advance from the 1 Kbit to the Gbit DRAM era.
Table of Contents
1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7.
SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation
by "Nielsen BookData"
