Mega-bit memory technology : from mega-bit to giga-bit

著者

• Tango, Hiroyuki

書誌事項

Mega-bit memory technology : from mega-bit to giga-bit

edited by Hiroyuki Tango

（Japanese technology reviews, sect.A. electronics ; v.32）

Gordon & Breach, c1998

内容説明・目次

内容説明

This book describes LSI process technology, and focuses on the rapid progress of state-of-the-art dynamic random access memory (DRAM) process technologies-the longstanding technology driver of Si ULSI-as they advance from the 1 Kbit to the Gbit DRAM era.

目次

1. Memory Cell 2. Dry Etching 3. Thin Film Insulator 4. Impurity Doping 5. Metalization 6. Crystal Technology 7. SOI Device Technology 8. Lithography 9. Chemical Vapor Deposition 10. Process and Device Simulation

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA42530092
• ISBN:
  • 9056990985
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Amsterdam
• ページ数/冊数: xiv, 292 p.
• 大きさ: 22 cm
• 分類:
  • DC21 : 621.3973
• 件名:
  • LCSH : Random access memory
  • LCSH : Integrated circuits -- Ultra large scale integration
• 親書誌ID:
  • BA18343769