1997 2nd International Workshop on Statistical Metrology, June 8, 1997, Kyoto

著者

• International Workshop on Statistical Metrology
• IEEE Electron Devices Society
• 応用物理学会 オウヨウ ブツリ ガッカイ

書誌事項

1997 2nd International Workshop on Statistical Metrology, June 8, 1997, Kyoto

sponsored by IEEE Electron Devices Society and in cooperation with Japan Society of Applied Physics ... [et al.]

Institute of Electrical and Electronics Engineers, c1997

タイトル別名

97TH8246

注記

"IEEE cat. no. 97TH8246."

Includes bibliographical references

内容説明・目次

内容説明

This workshop is a forum for discussion of issues in the generation and utilization of statistically significant measurements to characterize and VLSI validate processes, designs and equipment operations. Topics include: metadata; object-orientated techniques; and multidimensional data.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA43633578
• ISBN:
  • 0780337379
• LCCN: 96079035
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: [New York]
• ページ数/冊数: vi, 124 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
• 件名:
  • LCSH : Semiconductors -- Characterization -- Statistical methods -- Congresses
  • LCSH : Semiconductors -- Measurement -- Congresses