1999 Symposium on VLSI Technology : digest of technical papers, June 14-16, 1999, Kyoto
著者
書誌事項
1999 Symposium on VLSI Technology : digest of technical papers, June 14-16, 1999, Kyoto
Business Center for Academic Societites Japan, c1999
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- タイトル別名
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99CH36325
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注記
"JSAP cat. no. AP991214"
"IEEE cat no. 99CH36325"
Includes bibliographical references and index
内容説明・目次
内容説明
Papers presented in this symposium on very large scale integration (VLSI) technology cover topics within this field, such as SOI technology, dialectric reliability, channel engineering and DRAM capacitor technology.
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