Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia

著者

• Bergmann, Neil W.
• Reinhold, Olaf
• Tien, Norman C.
• Society of Photo-optical Instrumentation Engineers
• IREE Society
• Queensland Government State Development

書誌事項

Electronics and structures for MEMS : 27-29 October, 1999, Royal Pines Resort, Queensland, Australia

Neil W. Bergmann, Olaf Reinhold, Norman C. Tien, chairs/editors ; sponsored by SPIE--the International Society for Optical Engineering, IREE Society(Australia), Queensland Government State Development(Australia)

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 3891）

SPIE--the International Society of Optical Engineering, c1999

注記

Includes index

内容説明・目次

内容説明

A selection of 51 papers on various aspects of the electronics and structures used in the field of microelectromechanical systems.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA45648281
• ISBN:
  • 0819434922
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: viii, 428 p.
• 大きさ: 28 cm
• 親書誌ID:
  • BA0022700X