1998 3rd International Workshop on Statistical Metrology, June 7, 1998, Honolulu
Author(s)
Bibliographic Information
1998 3rd International Workshop on Statistical Metrology, June 7, 1998, Honolulu
Institute of Electrical and Electronics Engineers, c1998
- :softbound
- :microfiche
- Other Title
-
98EX113
Available at / 1 libraries
-
No Libraries matched.
- Remove all filters.
Note
"IEEE cat. no. 98EX113."
Includes bibliographical references
sponsored by the IEEE EDS Society and the 1998 Symposium on VLSI Technology
Description and Table of Contents
Description
This workshop focused on issues such as the generalization and utilization of statistically significant measurements to characterise and validate VLSI processes, designs and equipment operations. Papers discuss areas including yield ramping methodology in pre-produciton phase.
by "Nielsen BookData"
