1998 3rd International Workshop on Statistical Metrology, June 7, 1998, Honolulu
著者
書誌事項
1998 3rd International Workshop on Statistical Metrology, June 7, 1998, Honolulu
Institute of Electrical and Electronics Engineers, c1998
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- タイトル別名
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98EX113
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注記
"IEEE cat. no. 98EX113."
Includes bibliographical references
sponsored by the IEEE EDS Society and the 1998 Symposium on VLSI Technology
内容説明・目次
内容説明
This workshop focused on issues such as the generalization and utilization of statistically significant measurements to characterise and validate VLSI processes, designs and equipment operations. Papers discuss areas including yield ramping methodology in pre-produciton phase.
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