Handbook of advanced plasma processing techniques

Author(s)

• Shul, Randy J.
• Pearton, S. J.

Bibliographic Information

Handbook of advanced plasma processing techniques

R.J. Shul, S.J. Pearton (eds.)

（Physics and astronomy online library）

Springer, c2000

Note

Includes bibliographical references and index

Details

• NCID: BA48324956
• ISBN:
  • 3540667725
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Berlin
• Pages/Volumes: xvi, 653 p.
• Size: 25 cm
• Parent Bibliography ID:
  • BA48464922