Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium

Author(s)

• Andricacos, P. C.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

Bibliographic Information

Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium

editors, P. C. Andricacos ...[et al.]

（Proceedings / [Electrochemical Society], v. 99-9）

Electrochemical Society, c1999

Note

"Electronics and Dielectric Science and Technology Divisions"

Includes bibliographies and indexes

Details

• NCID: BA48975488
• ISBN:
  • 1566772311
• LCCN: 99069039
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, N.J.
• Pages/Volumes: ix, 400 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290