Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium

著者

• Andricacos, P. C.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium

editors, P. C. Andricacos ...[et al.]

（Proceedings / [Electrochemical Society], v. 99-9）

Electrochemical Society, c1999

注記

"Electronics and Dielectric Science and Technology Divisions"

Includes bibliographies and indexes

詳細情報

• NII書誌ID(NCID): BA48975488
• ISBN:
  • 1566772311
• LCCN: 99069039
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: ix, 400 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290