Substrate preparation for thin film deposition

Author(s)

• Vescan, L.

Bibliographic Information

Substrate preparation for thin film deposition

guest editor, L. Vescan

（Handbook of thin film process technology / editors, David A. Glocker, S. Ismat Shah, 99/1）

Institute of Physics Pub., c1999

Details

• NCID: BA49198143
• ISBN:
  • 0750305983
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bristol ; Philadelphia
• Pages/Volumes: 1 v.(loose-leaf)
• Size: 30 cm
• Parent Bibliography ID:
  • BA25838659