Handbook of thin film process technology

Author(s)

• Glocker, David A.
• Shah, S. Ismat

Bibliographic Information

Handbook of thin film process technology

editors, David A. Glocker, S. Ismat Shah

Institute of Physics Pub., c1995

Note

Includes bibliographical references and index

Details

• NCID: BA25838659
• ISBN:
  • 0750303115
• Country Code: uk
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bristol ; Philadelphia
• Pages/Volumes: 1 v. (various pagings)
• Size: 31 cm
• Classification:
  • NDC8 : 501.2