Microsystem technology

Author(s)

• Menz, Wolfgang
• Paul, Oliver
• Mohr, Jürgen

Bibliographic Information

Microsystem technology

W.Menz, J. Mohr, O. Paul

Wiley-VCH, c2001

Note

Bibliography: p. [465]-483

Details

• NCID: BA50808999
• ISBN:
  • 3527296344
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim ; Cambridge
• Pages/Volumes: xii, 500 p.
• Size: 25 cm
• Classification:
  • DC21 : 620.0011
• Subject Headings:
  • LCSH : Miniature electronic equipment
  • LCSH : Microelectronics
  • LCSH : Micromechanics
  • LCSH : Systems engineering