2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA
著者
書誌事項
2001 6th International Symposium on Plasma- and Process-Induced Damage, May 13-15, 2001, Monterey, California, USA
American Vacuum Society - Northen California Chapter, c2001
- : soft.
- タイトル別名
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01TH8538
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注記
"P2ID"-- on cover
"IEEE Catalog Number (softbound) 01TH8583" -- T. p. verso
Includes bibliographical references and index
内容説明・目次
内容説明
This work covers topics such as: damage measurement; plasma characterization and damage mitigation; non-volatile memories; ultra-thin dielectrics; contamination; and multi-terminal effects.
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