ID:DA13150844
Symposium on Plasma Process-Induced Damage, International
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Koji Eriguchi, S. Krishnan, and Terence Hook, editors
IEEE Operations Center c2003
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Terence Hook, Koji Eriguchi, and Calvin T. Gabriel, editors
AVS c2002
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Manfred Engelhardt, Terence Hook, and Calvin T. Gabriel, ; technical co-sponsors, American Vacuum Society, IEEE/Electron Devices Society, Japanese Society of Applied Physics
American Vacuum Society - Northen California Chapter c2001
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