Precision motion control : design and implementation
Author(s)
Bibliographic Information
Precision motion control : design and implementation
（Advances in industrial control）
Springer, c2001
Available at / 10 libraries
-
No Libraries matched.
- Remove all filters.
Note
Includes bibliographical references and index
Description and Table of Contents
Description
Precision manufacturing is a development that has been gathering momentum over the 20th century and accelerating over 25 years in terms of research, development, and application to product innovation. The driving force in this development arises from requirements for much higher performance of products, higher reliability, longer life, lower cost, and miniaturization. This development is widely known as precision engineering and, today, it is generally defined as manufacturing to tolerances which are better than one part in 105. Applications are abound and can be found in various semiconductor processes, (lithography, wafer probing, inspection), co-ordinate measuring machines (CMMs) and precision metrology systems (scanning probe microscopy (SPM)), robot/machine tools to carry out micro-assembly (MEMS) and delicate short wavelength laser processes. As an enabling technology for precision engineering, precision instrumentation and measurement, geometrical calibration and compensation, and motion control are directly important issues to be addressed in the overall system design and realization. This title is focused on these aspects of precision engineering.
It is a compilation of the major results and publications from a major project which develop a state-of-the-art high-speed, ultra-precision robotic system. A comprehensive and thorough treatment of the subject matter is provided in a manner that is amenable to a broad base of readers, ranging from the academics to the practitioners, by providing detailed experimental verifications of the developed materials.
Table of Contents
Overview of Nanotechnology.- Precision Tracking Control.- Automatic Tuning of Control Parameters.- Co-ordinated Motion Control of Gantry Systems.- Geometrical Error Compensation.- Electronic Interpolation Errors.- Vibration Monitoring and Control.- Other Engineering Aspects.- Appendix A. Laser Calibration Optics, Accessories and Set-up.
by "Nielsen BookData"
