2001 6th International Workshop on Statistical Methodology : IWSM, June 10, 2001, Kyoto

Author(s)

• International Workshop on Statistical Metrology
• IEEE Electron Devices Society
• VLSI Symposium
• 応用物理学会 オウヨウ ブツリ ガッカイ
• IEEE ED Tokyo Chapter
• 電子情報通信学会 デンシ ジョウホウ ツウシン ガッカイ

Bibliographic Information

2001 6th International Workshop on Statistical Methodology : IWSM, June 10, 2001, Kyoto

technical co-sponsored by IEEE Electron Devices Society ; co-sponsored by VLSI Symposium, the Japan Society of Applied Physics, IEEE ED Tokyo Chapter ; in cooperation with the Institute of Electronics, Information and Communication Engineers

Institute of Electrical and Electronics Engineers, c2001

• : soft.

Other Title

IWSM

01TH8550

Note

"IEEE cat. no. 01TH8550"

Includes bibliographical references

Description and Table of Contents

Description

The proceedings of the 6th International Workshop on Statistical Metrology, held in 2001. The papers cover: yield ramping methodology; metrology for statistical process control; sensor and measurement technology; spatial and temporal variation analysis methods; robust design; and more.

by "Nielsen BookData"

• NCID: BA53798097
• ISBN:
  • 0780366883
• LCCN: 00111492
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Piscataway, N.J.
• Pages/Volumes: vi, 67 p.
• Size: 28 cm