2001 IEEE International Symposium on Semiconductor Manufacturing : conference proceedings, October 8-10, 2001, San Jose, California

著者

• IEEE International Symposium on Semiconductor Manufacturing
• Institute of Electrical and Electronics Engineers
• IEEE Electron Devices Society
• Components, Packaging & Manufacturing Technology Society
• Semiconductor Equipment and Materials International
• 応用物理学会 オウヨウ ブツリ ガッカイ

書誌事項

2001 IEEE International Symposium on Semiconductor Manufacturing : conference proceedings, October 8-10, 2001, San Jose, California

[sponsored by IEEE Electron Devices Society, IEEE Components Packaging and Manufacturing Technology Society, Semiconductor Equipment & Materials International (SEMI), and Society of Applied Physics of Japan]

IEEE Service Center, c2001

• : softbound

タイトル別名

01CH37203

2001 IEEE International Symposium on Semiconductor Manufacturing, ISSM 2001, conference proceedings, October 8-10, 2001, San Jose, Colifornia

注記

Includes bibliographical references

"IEEE catalog number 01CH37203"--T.p. verso

内容説明・目次

内容説明

Topics covered in this volume include: factory design; manufacturing strategy and management; manufacturing control and execution; yield enhancement methodology; ultraclean technology; environment, safety and health; process and metrology equipment; and process and material optimization.

「Nielsen BookData」 より

詳細情報

• NII書誌ID(NCID): BA5444336X
• ISBN:
  • 0780367316
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway, N.J.
• ページ数/冊数: xi, 525 p.
• 大きさ: 28 cm