Microfabricated Systems and MEMS V : proceedings of the International Symposium
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Microfabricated Systems and MEMS V : proceedings of the International Symposium
(Proceedings / [Electrochemical Society], v. 2000-19)
Electrochemical Society, c2000
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注記
"Sensor, Dielectric Science & Technology, and Electronics Divisions"--on T.p
"... held in Phoenix, October 2000. This symposium has had a name change to represent the diversity of subject matter involved in the conference sessions"--on pref
Includes bibliographical references and indexes